Modeling and Inverse Compensation of Cross-Coupling Hysteresis in Piezoceramics under Multi-Input

In the fast tool servo (FTS) system for microstructure surface cutting, the dynamic voltage hysteresis of piezoelectric actuators (PEAs) and the cutting force produced in the manufacturing affect the driving accuracy and the cutting performance. For a multi-input-single-output (MISO) cutting system, in this paper, a dynamic hysteresis model based on a rate-dependent Prandtl–Ishlinskii model is proposed. A backpropagation neural network (BPNN) is established to describe the cross-coupling effect between the applied voltage and external load. An inverse dynamic model is developed to compensate the nonlinearity of PEAs. The accuracy of the model and its inverse is discussed and the performance of the inverse feedforward compensator is validated through experiments.